Patent Assignment
Reel/Frame 066112/0978
Assignment of Assignor's Interest
Recorded: 2024-01-12
Pages: 3
Assignor
HIRAYAMA, MASAKI
Executed: 2023-12-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus