Patent Assignment
Reel/Frame 066136/0669
Assignment of Assignor's Interest
Recorded: 2024-01-16
Pages: 4
Assignee
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
267, GAJEONG-RO, YUSEONG-GU, DAEJEON, 34113, KOREA, REPUBLIC OF
Covered Property
(1)
Device and Method for Measuring Thickness and Refractive Index of Multilayer Thin Film by Using Angle-Resolved Spectral Reflectometry