Patent Assignment
Reel/Frame 066152/0564
Assignment of Assignor's Interest
Recorded: 2024-01-17
Pages: 4
Assignors
KUMAR, RAVI
Executed: 2022-08-03
AGARWAL, PULKIT
Executed: 2022-07-05
LAVOIE, ADRIEN
Executed: 2022-07-05
AUSTIN, DUSTIN ZACHARY
Executed: 2022-07-05
ABEL, JOSEPH R.
Executed: 2022-07-05
AGNEW, DOUGLAS WALTER
Executed: 2022-07-05
BAKER, JONATHAN GRANT
Executed: 2022-07-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition of Silicon-Containing Films