Patent Assignment
Reel/Frame 066224/0315
Assignment of Assignor's Interest
Recorded: 2024-01-24
Pages: 5
Assignors
NAKAHATA, TOSHIHIKO
Executed: 2023-07-27
HASHIMOTO, KAZUYOSHI
Executed: 2023-07-27
YAMAGUCHI, HARUMASA
Executed: 2023-07-21
Assignee
ULVAC, INC.
2500 HAGISONO, CHIGASAKI-SHI, KANAGAWA, 2538543, JAPAN
Covered Property
(1)
Deposition Method and Deposition Apparatus