Patent Assignment
Reel/Frame 066281/0137
Assignment of Assignor's Interest
Recorded: 2024-01-29
Pages: 3
Assignors
STIEPAN, HANS-MICHAEL
Executed: 2023-09-27
MONZ, THOMAS
Executed: 2023-09-26
KALLER, JULIAN
Executed: 2023-09-04
LOERING, ULRICH
Executed: 2023-09-04
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Production Method and Measurement Method