Assignment of Assignor's Interest

Recorded: 2024-02-01 Pages: 4

Assignors

BEHNKE, MICHAEL

Executed: 2023-12-04

BIHR, ULRICH

Executed: 2023-12-04

RIEDESEL, CHRISTOF

Executed: 2024-01-30

THOMA, ARNE

Executed: 2024-01-30

ZEIDLER, DIRK

Executed: 2024-01-30

Assignee

CARL ZEISS MULTISEM GMBH

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Multi-Beam Charged Particle System and Method of Controlling the Working Distance in a Multi-Beam Charged Particle System

Application: 18/502,683 →

Publication: US 2024/0079207