Assignment of Assignor's Interest

Recorded: 2024-02-06 Pages: 3

Assignors

KANARIK, KEREN J.

Executed: 2019-03-20

TAN, SAMANTHA SIAMHWA

Executed: 2019-03-20

PAN, YANG

Executed: 2019-03-29

MARKS, JEFFREY

Executed: 2019-03-20

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Plasma Etching Chemistries of High Aspect Ratio Features in Dielectrics

Application: 18/431,669 →

Publication: US 2024/0178014