Assignment of Assignor's Interest

Recorded: 2024-02-13 Pages: 3

Assignor

PERLITZ, SASCHA

Executed: 2024-02-09

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method and Apparatus for Characterization of a Microlithography Mask

Application: 18/385,114 →

Publication: US 2024/0061328

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.