Patent Assignment
Reel/Frame 066458/0691
Assignment of Assignor's Interest
Recorded: 2024-02-14
Pages: 3
Assignor
HUH, SUNG RYUL
Executed: 2024-01-25
Assignee
KOREA ATOMIC ENERGY RESEARCH INSTITUTE
111, DAEDEOK-DAERO 989BEON-GIL, YUSEONG-GU, DAEJEON, 34057, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Uniformity Control System Using Multi-Pulsing and Control Method Thereof