Patent Assignment
Reel/Frame 066477/0647
Assignment of Assignor's Interest
Recorded: 2024-02-16
Pages: 3
Assignors
LEE, HSIN-CHANG
Executed: 2020-09-18
HSU, PEI-CHENG
Executed: 2020-09-18
HSUEH, WEN-CHANG
Executed: 2020-09-18
LIEN, TA-CHENG
Executed: 2020-09-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Mask Blanks and Methods for Depositing Layers on Mask Blank