Patent Assignment
Reel/Frame 066560/0047
Assignment of Assignor's Interest
Recorded: 2024-02-26
Pages: 4
Assignors
HASEGAWA, TOMO
Executed: 2023-02-24
GAMALEEV, VLADISLAV
Executed: 2023-02-24
GOSSET, NICOLAS
Executed: 2023-02-24
Assignee
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D’ORSAY, PARIS, 75007, FRANCE
Covered Property
(1)
Etching Method Using Oxygen-Containing Hydrofluorocarbon
Application:
18/114,134 →
Publication:
US 2024/0290627