Patent Assignment
Reel/Frame 066601/0741
Confirmatory License
Recorded: 2024-02-15
Pages: 2
Assignor
UNIVERSITY OF NEW MEXICO
Executed: 2022-09-26
Assignee
US DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE., SW, WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
REMOVING OR PREVENTING DRY ETCH-INDUCED DAMAGE IN Al/In/GaN FILMS BY PHOTOELECTROCHEMICAL ETCHING