Patent Assignment
Reel/Frame 066658/0060
Assignment of Assignor's Interest
Recorded: 2024-03-05
Pages: 3
Assignee
MICO CERAMICS LTD.
100, GONGDAN-RO, GYEONGGI-DO, ANSEONG, 17567, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck Heater and Manufacturing Method Therefor