Patent Assignment
Reel/Frame 066720/0777
Assignment of Assignor's Interest
Recorded: 2024-03-11
Pages: 4
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Patterning Parameter Determination Using a Charged Particle Inspection System
Application:
18/596,323 →
Publication:
US 2024/0212125