Patent Assignment
Reel/Frame 066778/0479
Assignment of Assignor's Interest
Recorded: 2024-03-14
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing a Substrate
Application:
18/604,228 →
Publication:
US 2025/0293037