Patent Assignment
Reel/Frame 066854/0047
Assignment of Assignor's Interest
Recorded: 2024-03-21
Pages: 3
Assignor
NA, SAE NA
Executed: 2021-03-04
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Operating a Metrology System, Lithographic Apparatus, and Methods Thereof
Application:
18/279,694 →
Publication:
US 2024/0231242
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.