Patent Assignment
Reel/Frame 066902/0953
Confirmatory License
Recorded: 2024-03-26
Pages: 2
Assignor
LAWRENCE LIVERMORE NATIONAL LABORATORY
Executed: 2024-03-06
Assignee
US DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE., SW, WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Liquid Tamped Targets for Extreme Ultraviolet Lithography
Application:
18/008,147 →
Publication:
US 2023/0280656
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.