Patent Assignment
Reel/Frame 066931/0676
Assignment of Assignor's Interest
Recorded: 2024-03-28
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Wet Atomic Layer Etching of Tungsten
Application:
18/619,491 →
Publication:
US 2025/0308917