Patent Assignment
Reel/Frame 066961/0725
Assignment of Assignor's Interest
Recorded: 2024-04-01
Pages: 6
Assignors
LEE, SANGHWAN
Executed: 2024-03-18
KIM, DOHYUNG
Executed: 2024-03-18
PARK, JINHONG
Executed: 2024-03-18
JEON, SUNGBIN
Executed: 2024-03-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Reticle Masking Device, Substrate Processing Apparatus Including the Same, and Substrate Processing Method Using the Same
Application:
18/618,345 →
Publication:
US 2025/0102926