Patent Assignment
Reel/Frame 066983/0912
Assignment of Assignor's Interest
Recorded: 2024-04-02
Pages: 3
Assignor
KOSAKA, YUTO
Executed: 2024-03-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOYKO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Power Supply System, Control Method, Program, and Storage Medium
Application:
18/605,996 →
Publication:
US 2024/0222080