Patent Assignment
Reel/Frame 067007/0270
Assignment of Assignor's Interest
Recorded: 2024-04-04
Pages: 4
Assignor
EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.
Executed: 2024-03-26
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Temperature Regulating Apparatus for Semiconductor-Device Manufacturing Equipment, and Semiconductor-Device Manufacturing System
Application:
18/189,639 →
Publication:
US 2023/0317482
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 24, 2023
From: FUKUSUMI, YUKIHIRO; NITTA, SHINICHI; KOKUBO, NORIO
To: EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.; CKD CORPORATION
Reel/Frame 063097/0688 →
Corrective Assignment to Correct the Street Address of the Receiving Party Previously Recorded at Reel: 063097 Frame: 0688. Assignor(S) Hereby Confirms the Assignment.
Apr 12, 2023
From: FUKUSUMI, YUKIHIRO; NITTA, SHINICHI; KOKUBO, NORIO
To: EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.; CKD CORPORATION
Reel/Frame 063309/0270 →