Patent Assignment
Reel/Frame 067049/0413
Assignment of Assignor's Interest
Recorded: 2024-04-09
Pages: 8
Assignors
YAMAMURA, TAKASHI
Executed: 2024-03-13
YANG, CHUNHSIANG
Executed: 2024-03-25
HAMA, YASUTAKA
Executed: 2024-03-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Application:
18/605,369 →
Publication:
US 2024/0222095