Patent Assignment
Reel/Frame 067120/0628
Assignment of Assignor's Interest
Recorded: 2024-04-16
Pages: 3
Assignor
DAHAL, TULASHI
Executed: 2024-04-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Wet Atomic Layer Etching of Molybdenum in Aqueous Solution
Patent:
12,604,691 →
Application:
18/636,818 →