Patent Assignment
Reel/Frame 067157/0620
Assignment of Assignor's Interest
Recorded: 2024-04-18
Pages: 4
Assignor
BEZEL, ILYA
Executed: 2024-04-16
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
High-Power Compact Vuv Laser-Sustained Plasma Light Source