Patent Assignment
Reel/Frame 067199/0011
Assignment of Assignor's Interest
Recorded: 2024-04-23
Pages: 3
Assignor
PATRA, MICHAEL
Executed: 2024-03-28
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Determining a Position of a Mirror