Patent Assignment
Reel/Frame 067211/0007
Assignment of Assignor's Interest
Recorded: 2024-04-24
Pages: 4
Assignors
MACHUCA, FRANCISCO
Executed: 2024-03-19
VUONG, VI
Executed: 2024-03-19
MITROVIC, ANDREJ
Executed: 2024-03-21
TIAN, XINKANG
Executed: 2024-04-24
TUITJE, HOLGER
Executed: 2024-03-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Hybrid X-Ray and Optical Metrology and Navigation
Application:
18/620,332 →
Publication:
US 2025/0060324