Patent Assignment
Reel/Frame 067406/0959
Assignment of Assignor's Interest
Recorded: 2024-05-14
Pages: 3
Assignors
YANG, MICHAEL X.
Executed: 2019-05-09
PFAHLER, CHRISTIAN
Executed: 2019-05-10
COSCEEV, ALEXANDR
Executed: 2019-05-09
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.