Patent Assignment
Reel/Frame 064626/0980
Assignment of Assignor's Interest
Recorded: 2023-08-17
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Support Plate for Localized Heating in Thermal Processing Systems
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
Related Assignments
(5)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 17, 2023
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0942 →
Assignment of Assignor's Interest
Aug 17, 2023
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES; HÜLSMANN, THORSTEN
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 064626/0949 →
Assignment of Assignor's Interest
Aug 17, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0958 →
Assignment of Assignor's Interest
Aug 18, 2023
From: YANG, MICHAEL X.; PFAHLER, CHRISTIAN; COSCEEV, ALEXANDR
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064632/0085 →
Assignment of Assignor's Interest
May 14, 2024
From: YANG, MICHAEL X.; PFAHLER, CHRISTIAN; COSCEEV, ALEXANDR
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 067406/0959 →