Patent Assignment
Reel/Frame 064632/0085
Assignment of Assignor's Interest
Recorded: 2023-08-18
Pages: 3
Assignors
YANG, MICHAEL X.
Executed: 2019-05-09
PFAHLER, CHRISTIAN
Executed: 2019-05-10
COSCEEV, ALEXANDR
Executed: 2019-05-09
Assignee
MATTSON TECHNOLOGY, INC.
PO BOX 1449, GREENVILLE, SOUTH CAROLINA, 29602
Covered Property
(1)
Support Plate for Localized Heating in Thermal Processing Systems
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 17, 2023
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0942 →
Assignment of Assignor's Interest
Aug 17, 2023
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES; HÜLSMANN, THORSTEN
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 064626/0949 →
Assignment of Assignor's Interest
Aug 17, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0958 →
Assignment of Assignor's Interest
Aug 17, 2023
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0980 →