Patent Assignment
Reel/Frame 064626/0942
Assignment of Assignor's Interest
Recorded: 2023-08-17
Pages: 3
Assignor
YANG, MICHAEL X.
Executed: 2018-04-11
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Support Plate for Localized Heating in Thermal Processing Systems
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 17, 2023
From: BREMENSDORFER, ROLF; KEPPLER, JOHANNES; HÜLSMANN, THORSTEN
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 064626/0949 →
Assignment of Assignor's Interest
Aug 17, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0958 →
Assignment of Assignor's Interest
Aug 17, 2023
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 064626/0980 →
Assignment of Assignor's Interest
Aug 18, 2023
From: YANG, MICHAEL X.; PFAHLER, CHRISTIAN; COSCEEV, ALEXANDR
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064632/0085 →