Patent Assignment
Reel/Frame 067411/0241
Assignment of Assignor's Interest
Recorded: 2024-05-14
Pages: 6
Assignors
SHIH, CHIH-TSUNG
Executed: 2020-01-31
LIU, BO-TSUN
Executed: 2020-01-31
WANG, CHEN-MING
Executed: 2020-02-17
CHENG, YAHRU
Executed: 2020-02-04
LEE, TSUNG CHUAN
Executed: 2020-02-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Reducing Undesired Light Influence in Extreme Ultraviolet Exposure