Patent Assignment
Reel/Frame 067476/0489
Assignment of Assignor's Interest
Recorded: 2024-05-21
Pages: 4
Assignors
CHOU, SHANG-I
Executed: 2022-02-24
WANG, DANDAN
Executed: 2022-02-16
GAJUDO, GIOVANNI PAOLO
Executed: 2022-02-16
GRAGG, GARY
Executed: 2022-02-22
O'NEILL, ROBERT G.
Executed: 2022-04-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Wide-Coverage Edge Ring for Enhanced Shielding in Substrate Processing Systems