Patent Assignment
Reel/Frame 067496/0781
Assignment of Assignor's Interest
Recorded: 2024-05-22
Pages: 5
Assignors
LIU, CHUNG-HSUAN
Executed: 2021-06-23
LIN, CHEN-YANG
Executed: 2021-06-24
SUNG, KU-HSIANG
Executed: 2021-06-22
YU, DA-WEI
Executed: 2021-06-24
LIN, KUAN-WEN
Executed: 2021-06-21
CHEN, CHIA-JEN
Executed: 2021-06-24
LEE, HSIN-CHANG
Executed: 2021-06-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Device for Cleaning Substrates