Patent Assignment
Reel/Frame 067601/0416
Assignment of Assignor's Interest
Recorded: 2024-06-03
Pages: 2
Assignor
PALANCHOKE, UJWOL
Executed: 2024-03-22
Assignee
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
25 RUE LEBLANC, BAT LE PONANT, PARIS, 75015, FRANCE
Covered Property
(1)
Method for Sizing a Gray Scale Lithography Mask