Patent Assignment
Reel/Frame 067696/0091
Assignment of Assignor's Interest
Recorded: 2024-06-12
Pages: 3
Assignors
LEE, JEONGSU
Executed: 2024-05-02
SHIN, DONGKOK
Executed: 2024-05-02
HERR, SONGWHE
Executed: 2024-05-02
KIM, DAEYOUN
Executed: 2024-05-02
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Wafer Processing Apparatus Using Plasma Phase Shift
Application:
18/674,057 →
Publication:
US 2024/0404790