Patent Assignment
Reel/Frame 067856/0448
Assignment of Assignor's Interest
Recorded: 2024-06-27
Pages: 3
Assignor
HIRAYAMA, MASAKI
Executed: 2024-06-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus