Patent Assignment
Reel/Frame 067898/0689
Assignment of Assignor's Interest
Recorded: 2024-07-02
Pages: 5
Assignors
VELLANKI, RAVI
Executed: 2020-12-24
PAN, YU
Executed: 2020-12-25
LENZ, ERIC H.
Executed: 2020-12-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Semiconductor Processing Chucks Featuring Recessed Regions Near Outer Perimeter of Wafer for Mitigation of Edge/Center Nonuniformity
Application:
17/757,553 →
Publication:
US 2023/0010049