Patent Assignment
Reel/Frame 067953/0236
Assignment of Assignor's Interest
Recorded: 2024-07-10
Pages: 5
Assignor
KO, HYUNGSIK
Executed: 2024-05-27
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Focus Ring, Substrate Processing Apparatus Including the Same, and Substrate Processing Method Using the Same