Patent Assignment
Reel/Frame 067980/0109
Assignment of Assignor's Interest
Recorded: 2024-07-12
Pages: 5
Assignors
LEE, HSIN-CHANG
Executed: 2019-01-04
HSU, PEI-CHENG
Executed: 2019-01-04
LIEN, TA-CHENG
Executed: 2019-01-04
WANG, TZU YI
Executed: 2019-01-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Euv Photo Masks
Application:
18/771,675 →
Publication:
US 2024/0369918