Patent Assignment
Reel/Frame 068358/0085
Assignment of Assignor's Interest
Recorded: 2024-08-21
Pages: 6
Assignors
CHO, YEONGCHAN
Executed: 2024-04-18
KIM, MINJAE
Executed: 2024-04-18
NAM, SUNGMIN
Executed: 2024-08-01
YANG, SEUNGHUNE
Executed: 2024-04-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Configuring Extreme Ultra-Violet (Euv) Illumination System, and Euv Exposure Method Using the Euv Illumination System
Application:
18/806,848 →
Publication:
US 2025/0138434