Patent Assignment
Reel/Frame 068464/0702
Assignment of Assignor's Interest
Recorded: 2024-09-03
Pages: 4
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Method for Manufacturing Semiconductor Device
Application:
18/820,393 →
Publication:
US 2024/0420935
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.