Patent Assignment
Reel/Frame 068589/0711
Assignment of Assignor's Interest
Recorded: 2024-09-15
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Source and Plasma Processing Apparatus
Application:
18/885,219 →
Publication:
US 2025/0104977