Patent Assignment
Reel/Frame 068669/0950
Assignment of Assignor's Interest
Recorded: 2024-09-24
Pages: 12
Assignors
MORIKUNI, YUICHIRO
Executed: 2024-08-24
KOYA, SHIGEO
Executed: 2024-08-23
NAKAJIMA, KAZUNORI
Executed: 2024-08-29
WATANABE, HIKARI
Executed: 2024-08-26
OGAWA, DAISUKE
Executed: 2024-09-09
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Substrate Holding Apparatus, Substrate Processing Apparatus, Separation Method, and Article Manufacturing Method
Application:
18/887,325 →
Publication:
US 2025/0093788