Patent Assignment
Reel/Frame 068672/0313
Assignment of Assignor's Interest
Recorded: 2024-09-24
Pages: 4
Assignors
SWILLAM, MOHAMED
Executed: 2021-07-26
GUO, WEI
Executed: 2021-07-20
ROUX, STEPHEN
Executed: 2021-07-26
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Systems with Phased Arrays for Contaminant Detection and Microscopy
Application:
18/578,168 →
Publication:
US 2024/0319617