Patent Assignment
Reel/Frame 068732/0461
Assignment of Assignor's Interest
Recorded: 2024-09-29
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Wet Atomic Layer Etching of Tungsten Using Halogenation
Application:
18/900,795 →
Publication:
US 2025/0308929