Patent Assignment
Reel/Frame 068843/0853
Assignment of Assignor's Interest
Recorded: 2024-10-09
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2023-12-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method