Patent Assignment
Reel/Frame 069048/0540
Assignment of Assignor's Interest
Recorded: 2024-09-25
Pages: 5
Assignors
YAMAGUCHI, YUJI
Executed: 2024-09-21
ORISAKA, MASAYUKI
Executed: 2024-09-13
MIYAGAWA, SAKI
Executed: 2024-09-14
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method