Patent Assignment
Reel/Frame 069059/0039
Assignment of Assignor's Interest
Recorded: 2024-10-29
Pages: 11
Assignors
REN, WEIMING
Executed: 2020-09-30
LIU, XUEDONG
Executed: 2021-09-02
CHEN, ZHONG-WEI
Executed: 2020-10-02
JI, XIAOYU
Executed: 2020-09-27
CHEN, XIAOXUE
Executed: 2020-09-29
ZHOU, WEIMIN
Executed: 2021-03-16
ZHANG, FRANK NAN
Executed: 2020-10-09
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Systems and Methods for Voltage Contrast Defect Detection