Patent Assignment
Reel/Frame 069146/0216
Assignment of Assignor's Interest
Recorded: 2024-11-05
Pages: 7
Assignors
MOON, MIN-YEONG
Executed: 2021-11-30
PANDEV, STILIAN
Executed: 2024-10-24
SANKO, DIMITRY
Executed: 2024-10-26
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Estimating in-Die Overlay with Tool Induced Shift Correction