Patent Assignment
Reel/Frame 069395/0869
Assignment of Assignor's Interest
Recorded: 2024-11-25
Pages: 18
Assignors
ARAMAKI, TAKASHI
Executed: 2024-10-21
LI, LIFU
Executed: 2024-10-21
SASAKI, NOBUTAKA
Executed: 2024-10-21
AKAMA, TOSHIKI
Executed: 2024-11-07
KATO, SHUSEI
Executed: 2024-10-22
PARK, GYEONG MIN
Executed: 2024-11-19
SHIMIZU, WATARU
Executed: 2024-10-21
KOITABASHI, RYOTA
Executed: 2024-10-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Method for Installing Edge Ring